METHOD FOR PRODUCING MIS TRANSISTORS

FIELD: semiconductor engineering; manufacture of metal-insulator- semiconductor transistors and integrated circuits. SUBSTANCE: method includes formation of source and drain regions, and sub-gate insulator on silicon wafer, formation of metal interconnections, estimation of adjustment of threshold v...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MASLOVSKIJ V.M, BONDARENKO G.G, BARYSHEV V.G, ULUNTS G.A, ANDREEV V.V, STOLJAROV A.A, TKACHENKO A.L
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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