METHOD OF SEPARATING SILICON INTO FRACTIONS ENRICHED WITH HEAVY AND LIGHT ISOTOPES

isotope separation technology. SUBSTANCE: method is based on chemical exchange between simple silicon-containing compounds: gas-phase substance SiH4 and liquid- phase substance Si2H6. Known monosilaneinto-disilane conversion technology is used involving passage of monosilane through electric discharge region and cooled traps. Because of isotope exchange, monosilane is enriched with light isotope 28Si and disilane with heavy isotope 30Si. Process is optimized by controlling pressure and temperature of reagents according to P-T phase state diagram of disilane. Withdrawal of enriched fractions and replacement of consumed reagent are performed not stopping production. Isotope separation process is conducted in closed mode. EFFECT: reduced process expenses. 2 tbl, 1 tbl