METHOD FOR TUNING NARROW-BAND ACOUSTIC-SURFACE- WAVE DEVICE TO CENTER FREQUENCY

acoustoelectronics. SUBSTANCE: method for tuning acoustic-surface-wave device using piezoelectric substrate whose effective surface carries pre-formed input and output interdigital transducers connected to measuring instrument includes irradiation of effective surface of piezoelectric substrate with...

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Bibliographische Detailangaben
Hauptverfasser:	ZIMA V.N, KIZIITOV K.M
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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Beschreibung
Zusammenfassung:	acoustoelectronics. SUBSTANCE: method for tuning acoustic-surface-wave device using piezoelectric substrate whose effective surface carries pre-formed input and output interdigital transducers connected to measuring instrument includes irradiation of effective surface of piezoelectric substrate with argon ions from high-frequency magnetron discharge plasma at pressure of 0.8 to 1.0 MPa, high-frequency specific power of 0.05 to 0.1 W/sq.cm, and bias on substrate effective surface of -50 to -60 V. EFFECT: facilitated manufacture. 3 dwg