MICROWAVE PLASMA GENERATOR

generation of microwave plasma flames. SUBSTANCE: invention can be used in processes of plasma-chemical deposition of films and lump materials of various composition ( silicon, diamond, diamond-like, etc ), in the capacity of torch working under atmospheric pressure to conduct glass and quartz blowi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KOSSYJ I.A, MISAKJAN M.A, TAKTAKISHVILI M.I, GRITSININ S.I, MALYKH N.I
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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