MICROWAVE PLASMA GENERATOR

generation of microwave plasma flames. SUBSTANCE: invention can be used in processes of plasma-chemical deposition of films and lump materials of various composition ( silicon, diamond, diamond-like, etc ), in the capacity of torch working under atmospheric pressure to conduct glass and quartz blowing and welding operations, in the capacity of air purification system ( purification of exhaust gases ) and for solution of ecological problems. Microwave plasma generator includes magnetron with power supply system, waveguide resonator, aid for output of microwave energy, coaxial path for transfer of microwave radiation, system feeding working gas. Resonator is built in the form of length of rectangular waveguide with hole in wide wall for input of microwave radiation generated by magnetron and with holes for input of loop of resonator coupling it with coaxial path of transfer of microwave radiation. Coaxial path is made of metal, for example, copper external electrode coming in the form of cylinder and internal central electrode fabricated from metal, for instance, copper tube connected to system feeding working gas which I continuation of coupling loop. End part of central electrode is manufactured in the form of Laval nozzle and is insulated from external electrode by quartz tube. External electrode is fitted with current-conducting extension piece that forms flame and protects against microwave radiation and is produced in the form of hollow cylinder with slits or holes in side surface. EFFECT: enhanced utilization of microwave energy, increased safety engineering while plasma generator operates thanks to prevention of radiation and scattering of microwave energy to environment, reduced cost and simplified design of plasma generator. 3 cl, 1 dwg