SEMICONDUCTOR PRESSURE TRANSDUCER

FIELD: automatic-control systems. SUBSTANCE: power sensitive resistors are introduced into the device in the form of structure of contrary rod-type electrodes applied on semiconductor substrate. Electrode-gate in the device is made of synthetic conducting material, for example, elastomer. Operation...

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Bibliographische Detailangaben
Hauptverfasser:	ZARIPOV M.F, PETROVA I.JU, REZNIK D.A
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	FIELD: automatic-control systems. SUBSTANCE: power sensitive resistors are introduced into the device in the form of structure of contrary rod-type electrodes applied on semiconductor substrate. Electrode-gate in the device is made of synthetic conducting material, for example, elastomer. Operation of applying the dielectric layer is simplified considerably, since it is applied in continuous layer and not fragmentarily. EFFECT: increased accuracy, enlarged measurement range. 2 cl, 3 dwg