X-RAY LENS
FIELD: devices using X-ray optics, for example, in X-ray microscopy, X-ray projection lithography systems, etc. SUBSTANCE: lens has mount carrying two mirrors different in diameter and provided with spherical reflecting surface; mount is installed for changing relative position of mirrors until thei...
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| creator | VINOGRADOV A.V ASADCHIKOV V.E ISHCHENKO N.V FEDORENKO ANATOLIJ IVANOVICH JULIN SERGEJ ANATOL'EVICH ARTJUKOV I.A KONDRATENKO VALERIJ VLADIMIROVICH SEROV R.V KAS'JANOV JU.S |
| description | FIELD: devices using X-ray optics, for example, in X-ray microscopy, X-ray projection lithography systems, etc. SUBSTANCE: lens has mount carrying two mirrors different in diameter and provided with spherical reflecting surface; mount is installed for changing relative position of mirrors until their centers of curvature are aligned; smaller-diameter mirror has spherical rear surface. Lens provides for displaying test objects incorporating elements smaller than 0.2 mcm especially when centers of curvature of spherical surfaces in smaller-diameter mirrors are aligned. EFFECT: provision for obtaining image in soft X- radiation with high spatial resolution. 2 cl, 1 dwgd |
| format | Patent |
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Lens provides for displaying test objects incorporating elements smaller than 0.2 mcm especially when centers of curvature of spherical surfaces in smaller-diameter mirrors are aligned. 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Lens provides for displaying test objects incorporating elements smaller than 0.2 mcm especially when centers of curvature of spherical surfaces in smaller-diameter mirrors are aligned. EFFECT: provision for obtaining image in soft X- radiation with high spatial resolution. 2 cl, 1 dwgd</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| subjects | GAMMA RAY OR X-RAY MICROSCOPES IRRADIATION DEVICES NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR |
| title | X-RAY LENS |
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