X-RAY LENS

X-RAY LENS

FIELD: devices using X-ray optics, for example, in X-ray microscopy, X-ray projection lithography systems, etc. SUBSTANCE: lens has mount carrying two mirrors different in diameter and provided with spherical reflecting surface; mount is installed for changing relative position of mirrors until thei...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: VINOGRADOV A.V, ASADCHIKOV V.E, ISHCHENKO N.V, FEDORENKO ANATOLIJ IVANOVICH, JULIN SERGEJ ANATOL'EVICH, ARTJUKOV I.A, KONDRATENKO VALERIJ VLADIMIROVICH, SEROV R.V, KAS'JANOV JU.S
Format: Patent
Sprache:eng
Schlagworte:
GAMMA RAY OR X-RAY MICROSCOPES
IRRADIATION DEVICES
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
PHYSICS
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:FIELD: devices using X-ray optics, for example, in X-ray microscopy, X-ray projection lithography systems, etc. SUBSTANCE: lens has mount carrying two mirrors different in diameter and provided with spherical reflecting surface; mount is installed for changing relative position of mirrors until their centers of curvature are aligned; smaller-diameter mirror has spherical rear surface. Lens provides for displaying test objects incorporating elements smaller than 0.2 mcm especially when centers of curvature of spherical surfaces in smaller-diameter mirrors are aligned. EFFECT: provision for obtaining image in soft X- radiation with high spatial resolution. 2 cl, 1 dwgd