APPARATUS FOR MOLECULAR-BEAM EPITAXY

FIELD: vacuum technics. SUBSTANCE: invention is designed for application in thin-film multilayer coating technology. Apparatus contains vacuum process chamber enclosing annular diffusers placed opposite to carrier, material vapor-supply systems connecting annular diffusers with material vapor source...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MIKHAJLOV N.N, MJASNIKOV V.N, BLINOV V.V, DVORETSKIJ S.A, GORJAEV E.P, STENIN S.I, SIDOROV JU.G
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMISTRY CRYSTAL GROWTH METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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