MAGNETRON SPRAYING SYSTEM

FIELD: plasma engineering; spraying thin films of metals and their alloys on sheet insulating materials of large area. SUBSTANCE: system has chamber accommodating cathodes and magnetic system. Cathodes are made in the form of sprayed material tubes provided with individual magnetic systems placed ve...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	KUZ'MIN O.S, LEGOSTAEV V.N, KRIVOBOKOV V.P
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	FIELD: plasma engineering; spraying thin films of metals and their alloys on sheet insulating materials of large area. SUBSTANCE: system has chamber accommodating cathodes and magnetic system. Cathodes are made in the form of sprayed material tubes provided with individual magnetic systems placed vertically in single row and spaced 100-200 mm apart; substrates are made of sheet material and placed on either side along side wall of chamber; they are free to displace relative to cathode row. EFFECT: improved design. 4 dwgu