METHOD OF GROWING SEMICONDUCTOR COMPOUND CRYSTALS

FIELD: microelectronics. SUBSTANCE: when manufacturing discrete semiconductor devices and integrated circuits, starting material is melted, shape of crystallization front is recorded, and thermodynamic parameters of monocrystal growth according to specified dependence are restored. EFFECT: optimized...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: DRAKOV A.A, OZERNYKH I.L, SAJAPIN S.N, BITUSHAN E.I, SVIRIDENKO I.P
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:FIELD: microelectronics. SUBSTANCE: when manufacturing discrete semiconductor devices and integrated circuits, starting material is melted, shape of crystallization front is recorded, and thermodynamic parameters of monocrystal growth according to specified dependence are restored. EFFECT: optimized growth of monocrystal. 1 dwg.