METHOD OF GROWING SEMICONDUCTOR COMPOUND CRYSTALS
FIELD: microelectronics. SUBSTANCE: when manufacturing discrete semiconductor devices and integrated circuits, starting material is melted, shape of crystallization front is recorded, and thermodynamic parameters of monocrystal growth according to specified dependence are restored. EFFECT: optimized...
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Zusammenfassung: | FIELD: microelectronics. SUBSTANCE: when manufacturing discrete semiconductor devices and integrated circuits, starting material is melted, shape of crystallization front is recorded, and thermodynamic parameters of monocrystal growth according to specified dependence are restored. EFFECT: optimized growth of monocrystal. 1 dwg. |
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