SOLID BODY PLASMA PROCESSING PLANT

PCT No. PCT/EP92/01131 Sec. 371 Date Feb. 1, 1994 Sec. 102(e) Date Feb. 1, 1994 PCT Filed May 19, 1992 PCT Pub. No. WO92/21220 PCT Pub. Date Nov. 26, 1992.Plasma treatment apparatus includes means to generate a plasma jet at atmospheric pressure, and means to control both the cross-sectional size of...

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Hauptverfasser:	CHABANOV ALIM I, KULIK PAVEL P, ZORINA EVGENIYA N, SHVETSOV VYACHESLAV M, IVANOV VLADIMIR V, PAVLOV GEORGIJ YA, LOGOSHIN ALEKSEJ N
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY CLADDING OR PLATING BY SOLDERING OR WELDING COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY PERFORMING OPERATIONS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING WELDING WORKING BY LASER BEAM
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Zusammenfassung:	PCT No. PCT/EP92/01131 Sec. 371 Date Feb. 1, 1994 Sec. 102(e) Date Feb. 1, 1994 PCT Filed May 19, 1992 PCT Pub. No. WO92/21220 PCT Pub. Date Nov. 26, 1992.Plasma treatment apparatus includes means to generate a plasma jet at atmospheric pressure, and means to control both the cross-sectional size of the jet and the relative speed of movement between the jet and a body being treated.