PROCESS FOR MANUFACTURING METALLIC NANO-WIRES

The invention relates to a process for manufacturing metallic nano-wires of micro-wires previously obtained with the Taylor-Ulitovski method, with applications in electrical engineering, used to manufacture devices such as MEMS, NEMS, sensors and the like. According to the invention, the process is...

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Hauptverfasser: PATROI DELIA, LIXANDRU ALEXANDRU, MANTA EUGEN, IORGA ALEXANDRU, CODESCU MIRELA MARIA, PATROI EROS ALEXANDRU, STANCU NICOLAE, KAPPEL WILHELM
Format: Patent
Sprache:eng ; rum
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Zusammenfassung:The invention relates to a process for manufacturing metallic nano-wires of micro-wires previously obtained with the Taylor-Ulitovski method, with applications in electrical engineering, used to manufacture devices such as MEMS, NEMS, sensors and the like. According to the invention, the process is carried out by means of an installation consisting of a thermal treatment furnace (1), a temperature regulator (2) with thermocouple (3), a quartz tube (4) with the role of enclosure for achieving a controlled atmosphere, a system (5) for clamping the furnace (1) and the quartz tube (4), a high-vacuum pump (6) for achieving a quartz tube vacuum of up to 10mbar, an autotransformer (7) and a system (8) for stretching micro-wires, the process having three stages: 1. making the alloy in a Leybold - Heraeus-type induction furnace with a capacity of maximum 2 kg where, after finishing the melting and removing the slag, the alloy is drawn into quartz rods, 2. manufacturing the metallic micro-wires by introducing the alloy into the glass tube so as the melted metal to touch the tube walls, with a quartz rod the glass is closed about the melted metal, and, after removing the oxides with the quartz rod, the alloy is stirred and hooked in an engaging system, 3. manufacturing metallic nano-wires using the installation for manufacturing the metallic nano-wires, by transferring the micro-wires on a reel in order to make bundles with a predetermined number of micro-wires which are then subjected to a thermal treatment of elongation and, by means of the stretching system (8), the micro-wire bundle is heated and elongated in the same time, so that it is imparted the following characteristics: mu= 10...1000000, J= 0.5...1.7 T, H= 10...1000 kA/m, diameter of metallic core/nano-wire : 50...100 nm, metallic wire number in the bundle : 20...50000 and length of nano-wire/nano-wire bundle : 10...60 mm. Invenţia se referă la un procedeu de obţinere al unor nanofire metalice, din microfire obţinute în prealabil cu metoda Taylor-Ulitovski, cu aplicaţii în domeniul ingineriei electrice utilizate la realizarea unor dispozitive cum sunt MEMS, NEMS, senzori şi altele asemenea. Procedeul conform invenţiei se realizează cu ajutorul unei instalaţii alcătuite dintr-un cuptor (1) de tratament termic, un regulator (2) de temperatură cu termocuplu (3), un tub (4) de cuarţ cu rol de incintă pentru realizarea atmosferei controlate, un sistem (5) de prindere a cuptorului (1) şi a tubului (4) de cuarţ,