ENHANCING PLASMA SURFACE MODIFICATION USING HIGH INTENSITY AND HIGH POWER ULTRASONIC ACOUSTIC WAVES

ENHANCING PLASMA SURFACE MODIFICATION USING HIGH INTENSITY AND HIGH POWER ULTRASONIC ACOUSTIC WAVES

This invention relates to enhancing a gas-phase reaction in a plasma comprising: creating plasma by at least one plasma source, and wherein that the method further comprises: generating ultrasonic high intensity and high power acoustic waves having a predetermined amount of acoustic energy by at lea...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KUSANO, YUKIHIRO, KREBS, NIELS, MORTENSEN, HENRIK JUNGE, BINDSLEV, HENRIK, BARDENSHTEIN, ALEXANDER
Format: Patent
Sprache:eng ; pol
Schlagworte:
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PLASMA TECHNIQUE
PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS
PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Beschreibung
Zusammenfassung:This invention relates to enhancing a gas-phase reaction in a plasma comprising: creating plasma by at least one plasma source, and wherein that the method further comprises: generating ultrasonic high intensity and high power acoustic waves having a predetermined amount of acoustic energy by at least one ultrasonic high intensity and high power gas-jet acoustic wave generator, where said ultrasonic high intensity and high power acoustic waves are directed to propagate towards said plasma so that at least a part of said predetermined amount of acoustic energy is absorbed into said plasma, and where a sound pressure level of said generated ultrasonic high intensity and high power acoustic waves is at least substantially 140 dB and where an acoustic power of said generated ultrasonic high intensity and high power acoustic waves is at least substantially 100 W.