POLISHING FLUID COMPOSITION FOR GLASS HARD DISC SUBSTRATES
Provided is a polishing fluid composition for glass hard disc substrates which combines a high polish rate and high cleanliness and which, even when used in a fluid-circulating polishing system, can keep a high polish rate for a long time. A polishing fluid composition for glass hard disc substrates...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Provided is a polishing fluid composition for glass hard disc substrates which combines a high polish rate and high cleanliness and which, even when used in a fluid-circulating polishing system, can keep a high polish rate for a long time. A polishing fluid composition for glass hard disc substrates which comprises an amine compound, an acid, silica particles, and water, wherein the amine compound is selected from the group consisting of amino alcohols, piperazine, and derivatives thereof and contains two or three nitrogen atoms in the molecule, at least one of the nitrogen atoms being in the form of a primary or secondary amine. |
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