Calcium carbonate slurry

A composition for use in polishing a substrate is provided that comprises a calcium carbonate slurry. The calcium carbonate slurry comprises a plurality of calcium carbonate particles having an average diameter between about 10 nm to 3 µm suspended in a solution, where the solution consists of i) water, a buffer, or combinations thereof; ii) a dispersant selected from the group consisting of sodium polyacrylate, sodium n-silicate, sodium tetrapyrophosphate, sodium hexametaphosphate, sodium polyalluminate, sodium tetraborate, sodium triphosphate, sodium citrate, and combinations thereof; iii) a surfactant selected from the group consisting of sodium dodecyl sulfate (SDS), polysorbate, octylphenol ethoxylate, and combinations thereof, and iv) an optional chelating agent. The concentration of the calcium carbonate particles in the calcium carbonate slurry is equal to or less than about 2.0 wt.%, and the concentration of the dispersant in the calcium carbonate slurry ranges from about 0.1 wt.% and 0.5 wt.%