VANDIG FREMKALLERBLANDING FOR FOTORESISTMATERIALER

The present specification describes an aqueous developer composition which can develop solvent developable photosensitive materials and comprises a surfactant, a terpene and water, in defined proportions. In a preferred form, the composition includes about 0.5-10% by wt. of a surfactant, and about 0...

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Bibliographische Detailangaben
Hauptverfasser:	HUNG, PAUL L.K, TSENG, KENNETH K.S
Format:	Patent
Sprache:	nor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CINEMATOGRAPHY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PRINTED CIRCUITS
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Beschreibung
Zusammenfassung:	The present specification describes an aqueous developer composition which can develop solvent developable photosensitive materials and comprises a surfactant, a terpene and water, in defined proportions. In a preferred form, the composition includes about 0.5-10% by wt. of a surfactant, and about 0.2-10% by wt. of a terpene, the rest being water. Most preferably, the composition comprises about 3-6% by wt. of a surfactant, and about 4-8% by wt. of a terpene, the rest being water. The surfactant is preferably a non-ionic surfactant or mixture thereof, and the terpene is d-limonene. A concentrate formulation also is provided herein from which the aqueous developer composition may be made by dilution with water, usually in an amount of about five to ten times of the concentrate.