Fotoakustisk gassdetektor

PCT No. PCT/NO96/00024 Sec. 371 Date Dec. 5, 1997 Sec. 102(e) Date Dec. 5, 1997 PCT Filed Feb. 2, 1996 PCT Pub. No. WO96/24831 PCT Pub. Date Aug. 15, 1996A photoacoustic detector including a chamber (1) for receiving the gas, a path for pulsed or modulated IR radiation (2) into, through and out of t...

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Bibliographische Detailangaben
Hauptverfasser:	OEHLCKERS, PER A, BERNSTEIN, RALPH W, FERBER, ALAIN
Format:	Patent
Sprache:	nor
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Zusammenfassung:	PCT No. PCT/NO96/00024 Sec. 371 Date Dec. 5, 1997 Sec. 102(e) Date Dec. 5, 1997 PCT Filed Feb. 2, 1996 PCT Pub. No. WO96/24831 PCT Pub. Date Aug. 15, 1996A photoacoustic detector including a chamber (1) for receiving the gas, a path for pulsed or modulated IR radiation (2) into, through and out of the chamber, and a pressure sensor (3A-B) adapted to measure pressure changes in the chamber caused by the applied IR radiation. The chamber is formed by joining together at least two major semiconductor elements, in particular, silicon or quartz elements (4A-B) made in planar technology. At least a first element from a major surface (9A-B) has an etched recess which constitutes a substantial proportion of the volume of the chamber. At least one of the elements is provided with a membrane for the pressure sensor, and the space (7) in front of the membrane communicates with the chamber.