PELLICLE MEMBRANE

The invention relates to a pellicle assembly comprising a pellicle membrane supported by a frame, wherein the pellicle membrane does not extend fully to an outer edge of the frame. A border stack comprising a plurality of layers may be provided between the frame and the pellicle membrane, and 5 wher...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	DENNIS DE GRAAF, INCI DONMEZ NOYAN, ANNE-SOPHIE ROLLIER, MAXIME BIRON, TIES WOUTER VAN DER WOORD, CHAITANYA KRISHNA ANDE, ADRIANUS JOHANNES MARIA GIESBERS, LOURDES FERRE LLIN, FRANCISCUS THEODORUS AGRICOLA, FAI TONG SI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	The invention relates to a pellicle assembly comprising a pellicle membrane supported by a frame, wherein the pellicle membrane does not extend fully to an outer edge of the frame. A border stack comprising a plurality of layers may be provided between the frame and the pellicle membrane, and 5 wherein at least part of the border stack does not extend fully to an outer edge of the frame. An outer edge of the pellicle membrane, and optionally at least part of the border stack, may be provided with a shape for use as an alignment mark.