System and process for imprinting

The invention relates to a system and process for imprinting, in particular nanoimprinting. The system comprises thereto a combination of a roller configured for rolling at least one flexible stamp over at least one substrate which is to be imprinted, a stage configured for providing support to at l...

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Bibliographische Detailangaben
Hauptverfasser:	ROB ANTONIUS WALTHERUS NEELEN, JAN MATTHIJS TER MEULEN
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	The invention relates to a system and process for imprinting, in particular nanoimprinting. The system comprises thereto a combination of a roller configured for rolling at least one flexible stamp over at least one substrate which is to be imprinted, a stage configured for providing support to at least one carrier and/or at least one substrate during imprinting and a carrier configured for carrying at least one substrate which is to be imprinted.