PELLICLE MEMBRANE

,| A pellicle membrane for a lithographic apparatus, wherein the pellicle membrane comprises metal silicide and a reinforcing network. The reinforcing network can be located between metal silicide layers. The reinforcing network can be irregular. The reinforcing network includes windows with a maxim...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ANNE-SOPHIE ROLLIER, DENNIS DE GRAAF, INCI DONMEZ NOYAN, MAXIME BIRON, TIES WOUTER VAN DER WOORD, CHAITANYA KRISHNA ANDE, ADRIANUS JOHANNES MARIA GIESBERS, LOURDES FERRE LLIN, FRANCISCUS THEODORUS AGRICOLA, FAI TONG SI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	,\| A pellicle membrane for a lithographic apparatus, wherein the pellicle membrane comprises metal silicide and a reinforcing network. The reinforcing network can be located between metal silicide layers. The reinforcing network can be irregular. The reinforcing network includes windows with a maximum dimension of up to 20 microns. The reinforcing network includes windows haVing an average size of at least 5 microns.