A positioning system for positioning an object within an XYZ-system of coordinates

According to the disclosure, a positioning system for positioning an object within an XYZ-system of coordinates is proposed, with the positioning system comprising a supporting structure, an object table for supporting the object and a positioning module structured for positioning the object table r...

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Bibliographische Detailangaben
Hauptverfasser:	JOHANNES HUBERTUS ANTONIUS VAN DE RIJDT, ROB ANTONIUS ANDRIES VERKOOIJEN, JOHANNES WILHELMUS DE KLERK
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	According to the disclosure, a positioning system for positioning an object within an XYZ-system of coordinates is proposed, with the positioning system comprising a supporting structure, an object table for supporting the object and a positioning module structured for positioning the object table relative to the supporting structure within the XYZ-system of coordinates, wherein the positioning module comprises a frame for supporting the object table and at least three actuator devices, each structured for positioning the frame in the Z-direction of the XYZ-system of coordinates.