Multiple particle beam microscope and associated method with an improved focus setting taking account of an image plane tilt

Multiple particle beam microscope and associated method with an improved focus setting taking account of an image plane tilt

The invention relates to a multiple particle beam microscope and an associated method for setting an optimal focal plane with an optical resolution and setting a telecentric irradiation with the plurality of the primary beams. A method is proposed to determine an optimal setting plane, into which an...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: DIRK ZEIDLER, MICHAEL BEHNKE, NICOLE RAUWOLF, INGO MUELLER, NICO KAEMMER, GUNTHER SCHEUNERT, ARNE THOMA, CHRISTOF RIEDESEL
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator DIRK ZEIDLER
MICHAEL BEHNKE
NICOLE RAUWOLF
INGO MUELLER
NICO KAEMMER
GUNTHER SCHEUNERT
ARNE THOMA
CHRISTOF RIEDESEL
description The invention relates to a multiple particle beam microscope and an associated method for setting an optimal focal plane with an optical resolution and setting a telecentric irradiation with the plurality of the primary beams. A method is proposed to determine an optimal setting plane, into which an object surface is brought. Further, means are proposed which facilitate an improved resolution and telecentric irradiation for a large number of primary beams. The means comprise a targeted selection and targeted individual influencing of individual primary beams and/or means for influencing the plurality of primary beams in collective fashion.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_NL2030761BB1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>NL2030761BB1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_NL2030761BB13</originalsourceid><addsrcrecordid>eNqNjTEKwkAQRdNYiHqH8QBCYkD7iGKhVvZh3EySwd2dJTvRxsO7ogewep__H_xp9jqPVjlYgoCDsknhRujAsRkkGgkE6BvAGMUwKjXgSHtp4MnapwnYhUEeqW_FjBEiqbLvQPH-ARojo1eQ9util44segJlq_Ns0qKNtPhxli0P--vuuKIgNcWAhjxpfTmt8zLfboqqKsp_nDcZu0fu</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Multiple particle beam microscope and associated method with an improved focus setting taking account of an image plane tilt</title><source>esp@cenet</source><creator>DIRK ZEIDLER ; MICHAEL BEHNKE ; NICOLE RAUWOLF ; INGO MUELLER ; NICO KAEMMER ; GUNTHER SCHEUNERT ; ARNE THOMA ; CHRISTOF RIEDESEL</creator><creatorcontrib>DIRK ZEIDLER ; MICHAEL BEHNKE ; NICOLE RAUWOLF ; INGO MUELLER ; NICO KAEMMER ; GUNTHER SCHEUNERT ; ARNE THOMA ; CHRISTOF RIEDESEL</creatorcontrib><description>The invention relates to a multiple particle beam microscope and an associated method for setting an optimal focal plane with an optical resolution and setting a telecentric irradiation with the plurality of the primary beams. A method is proposed to determine an optimal setting plane, into which an object surface is brought. Further, means are proposed which facilitate an improved resolution and telecentric irradiation for a large number of primary beams. The means comprise a targeted selection and targeted individual influencing of individual primary beams and/or means for influencing the plurality of primary beams in collective fashion.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20240325&amp;DB=EPODOC&amp;CC=NL&amp;NR=2030761B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20240325&amp;DB=EPODOC&amp;CC=NL&amp;NR=2030761B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>DIRK ZEIDLER</creatorcontrib><creatorcontrib>MICHAEL BEHNKE</creatorcontrib><creatorcontrib>NICOLE RAUWOLF</creatorcontrib><creatorcontrib>INGO MUELLER</creatorcontrib><creatorcontrib>NICO KAEMMER</creatorcontrib><creatorcontrib>GUNTHER SCHEUNERT</creatorcontrib><creatorcontrib>ARNE THOMA</creatorcontrib><creatorcontrib>CHRISTOF RIEDESEL</creatorcontrib><title>Multiple particle beam microscope and associated method with an improved focus setting taking account of an image plane tilt</title><description>The invention relates to a multiple particle beam microscope and an associated method for setting an optimal focal plane with an optical resolution and setting a telecentric irradiation with the plurality of the primary beams. A method is proposed to determine an optimal setting plane, into which an object surface is brought. Further, means are proposed which facilitate an improved resolution and telecentric irradiation for a large number of primary beams. The means comprise a targeted selection and targeted individual influencing of individual primary beams and/or means for influencing the plurality of primary beams in collective fashion.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjTEKwkAQRdNYiHqH8QBCYkD7iGKhVvZh3EySwd2dJTvRxsO7ogewep__H_xp9jqPVjlYgoCDsknhRujAsRkkGgkE6BvAGMUwKjXgSHtp4MnapwnYhUEeqW_FjBEiqbLvQPH-ARojo1eQ9util44segJlq_Ns0qKNtPhxli0P--vuuKIgNcWAhjxpfTmt8zLfboqqKsp_nDcZu0fu</recordid><startdate>20240325</startdate><enddate>20240325</enddate><creator>DIRK ZEIDLER</creator><creator>MICHAEL BEHNKE</creator><creator>NICOLE RAUWOLF</creator><creator>INGO MUELLER</creator><creator>NICO KAEMMER</creator><creator>GUNTHER SCHEUNERT</creator><creator>ARNE THOMA</creator><creator>CHRISTOF RIEDESEL</creator><scope>EVB</scope></search><sort><creationdate>20240325</creationdate><title>Multiple particle beam microscope and associated method with an improved focus setting taking account of an image plane tilt</title><author>DIRK ZEIDLER ; MICHAEL BEHNKE ; NICOLE RAUWOLF ; INGO MUELLER ; NICO KAEMMER ; GUNTHER SCHEUNERT ; ARNE THOMA ; CHRISTOF RIEDESEL</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_NL2030761BB13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2024</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><toplevel>online_resources</toplevel><creatorcontrib>DIRK ZEIDLER</creatorcontrib><creatorcontrib>MICHAEL BEHNKE</creatorcontrib><creatorcontrib>NICOLE RAUWOLF</creatorcontrib><creatorcontrib>INGO MUELLER</creatorcontrib><creatorcontrib>NICO KAEMMER</creatorcontrib><creatorcontrib>GUNTHER SCHEUNERT</creatorcontrib><creatorcontrib>ARNE THOMA</creatorcontrib><creatorcontrib>CHRISTOF RIEDESEL</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>DIRK ZEIDLER</au><au>MICHAEL BEHNKE</au><au>NICOLE RAUWOLF</au><au>INGO MUELLER</au><au>NICO KAEMMER</au><au>GUNTHER SCHEUNERT</au><au>ARNE THOMA</au><au>CHRISTOF RIEDESEL</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Multiple particle beam microscope and associated method with an improved focus setting taking account of an image plane tilt</title><date>2024-03-25</date><risdate>2024</risdate><abstract>The invention relates to a multiple particle beam microscope and an associated method for setting an optimal focal plane with an optical resolution and setting a telecentric irradiation with the plurality of the primary beams. A method is proposed to determine an optimal setting plane, into which an object surface is brought. Further, means are proposed which facilitate an improved resolution and telecentric irradiation for a large number of primary beams. The means comprise a targeted selection and targeted individual influencing of individual primary beams and/or means for influencing the plurality of primary beams in collective fashion.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_NL2030761BB1
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title Multiple particle beam microscope and associated method with an improved focus setting taking account of an image plane tilt
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-25T13%3A17%3A53IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=DIRK%20ZEIDLER&rft.date=2024-03-25&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ENL2030761BB1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true