Multiple particle beam microscope and associated method with an improved focus setting taking account of an image plane tilt

The invention relates to a multiple particle beam microscope and an associated method for setting an optimal focal plane with an optical resolution and setting a telecentric irradiation with the plurality of the primary beams. A method is proposed to determine an optimal setting plane, into which an object surface is brought. Further, means are proposed which facilitate an improved resolution and telecentric irradiation for a large number of primary beams. The means comprise a targeted selection and targeted individual influencing of individual primary beams and/or means for influencing the plurality of primary beams in collective fashion.