Scanning probe microscopy system and method of operating such a system

The present document relates to a scanning probe microscopy system comprising a sample support structure, a sensor head including a probe, a deflection sensor unit, and actuators including a Z-motion actuator and a scanning actuator. The system further comprises a control unit, able to receive the d...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAMED SADEGHIAN MARNANI, RUUD RUIZENAAR, JAKOB VAN DE LAAR, ARSENIY KALININ
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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