Scanning probe microscopy system and method of operating such a system

The present document relates to a scanning probe microscopy system comprising a sample support structure, a sensor head including a probe, a deflection sensor unit, and actuators including a Z-motion actuator and a scanning actuator. The system further comprises a control unit, able to receive the deflection sensor signal and control the actuators. The control unit comprises multiple signal processing units, each enabling to: receive the deflection signal, provide a processed signal, and cooperating With a triggering unit Which comp ares the processed signal against a predefined triggering condition, and generates a trigger When the condition is met.