Microfluidic device and method for filling a fluid chamber of such a device

Microfluidic device comprising a microfluidic circuit comprising a main fluid channel and an inlet coupled to the main fluid channel for introducing fluid into the microfluidic circuit and at least one fluid chamber 5 configuration, wherein the fluid chamber configuration comprises: - at least one fluid chamber; - a fluid chamber inlet channel coupling the main fluid channel to an inlet of the fluid chamber; - a fluid chamber outlet channel coupled to an outlet of the fluid chamber; - a pressure stop valve arranged in the main fluid channel downstream of the coupling with the fluid 10 chamber inlet channel, wherein the pressure stop valve is arranged to block fluid at a pressure below a first burst pressure; - a flow restrictor arranged in the fluid chamber outlet channel, wherein the flow restrictor is arranged to provide a back pressure which is higher than the first burst pressure of the pressure stop valve.