Method of and arrangement for verifying an alignment of an infinity-corrected objective

Method of and arrangement for verifying an alignment of an infinity- corrected objective. Abstract The invention is directed at a method of verifying an alignment of an infinity-corrected objective with an optical axis of an optical system. The optical system comprises the infinity-corrected objective configured for receiving radiation from a field of view, an optical sensor for forming an image of the radiation on an optical sensor screen, and a tube lens for focusing the radiation from the infinity-corrected objective onto the optical sensor screen. The method comprises arranging a calibration element in the field of view of the infinity-corrected objective, illuminating the calibration element with a first radiation signal at a first wavelength, and obtaining a first output signal from the optical sensor. The method further includes illuminating the calibration element with a second radiation signal at a second wavelength, obtaining a second output signal from the optical sensor, and comparing the first output signal with the second output signal for detecting a difference between the first and the second output signal, and verifying a correctness of the alignment of the infinity-corrected objective with the optical axis of the optical system dependent on the detected difference. The invention is further directed at an arrangement, an optical system, a scanning probe microscopy device, and a method of manufacturing an optical system.