ALIGNMENT SYSTEM AND METHOD FOR ALIGNING AN OBJECT HAVING AN ALIGNMENT MARK

An alignment system and method for aligning an object (O) having an object marker. An image of the object marker is projected onto an imaging sensor (1 1) having sensor elements. At least one reference marker is projected onto the imaging sensor (1 1). Based on image output (11 1) from the imaging s...

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Hauptverfasser:	HAMED SADEGHIAN MARNANI, ERIK TABAK, TARAS PISKUNOV
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	An alignment system and method for aligning an object (O) having an object marker. An image of the object marker is projected onto an imaging sensor (1 1) having sensor elements. At least one reference marker is projected onto the imaging sensor (1 1). Based on image output (11 1) from the imaging sensor (11), respective subsets of sensor elements are determined. Based on a first subset of the sensor elements, a marker position is determined Where the image of the object marker is projected onto the imaging sensor (1 1). Based on a second subset (Sr) of the sensor elements, a reference position is determined Where the reference marker is projected onto the imaging sensor (1 1). The marker position correlates With a position (Xm,Ym) of the object (0) Whereas the reference position does not. The object position (Xm,Ym) is determined based on the marker position relative to the reference position.