MEMS-based microphone and microphone assembly

A micro-electro mechanical systems, MEMS, -based microphone (1) for detecting sound signals. The MEMS-based microphone (1) comprises a body (2), a resonator (3) and a cavity provided in the body (2), the resonator (3) covering at least a part ofthe cavity (7). The cavity (7) comprises a gas volume....

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Bibliographische Detailangaben
Hauptverfasser:	MARNIX ABRAHAMS, PETER GERARD STEENEKEN, JORGE ABRAHAM MARTINEZ CASTANEDA, GERARD JAN VERBIEST
Format:	Patent
Sprache:	eng
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS PUBLIC ADDRESS SYSTEMS TESTING
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Beschreibung
Zusammenfassung:	A micro-electro mechanical systems, MEMS, -based microphone (1) for detecting sound signals. The MEMS-based microphone (1) comprises a body (2), a resonator (3) and a cavity provided in the body (2), the resonator (3) covering at least a part ofthe cavity (7). The cavity (7) comprises a gas volume. The MEMS-based microphone (1) further comprises a venting system (10) connecting the cavity (7) to an external environment, Wherein the resonator (3) is arranged to vibrate at a mechanical resonance frequency higher than a characteristic equilibration frequency, the mechanical resonance frequency being variable in response to a pressure modulation of the gas volume in the cavity (7) caused by a sound signal in the external environment during operation. The characteristic equilibration frequency is dependent on the structure parameters of the cavity (7), and is equal or larger than a maximal frequency of the sound signal to be detected