A PIEZOELECTRIC TRANSDUCER, AN ACTUATOR SYSTEM, A MEASUREMENT SYSTEM, A CONTROL SYSTEM, AN OPTICAL METROLOGY TOOL, AN E-BEAM INSPECTION TOOL, A LITHOGRAPHIC APPARATUS, A PIEZO TRANSDUCER MANUFACTURING METHOD AND A DEVICE MANUFACTURING METHOD

The invention relates to a piezoelectric transducer with a length, a width and a thickness, wherein the piezoelectric transducer includes a stack of layers extending in the length and width direction, wherein the stack of layers comprises a plurality of first layers and a plurality of second layers, a first layer being arranged next to a second layer seen in thickness direction, wherein each first layer includes piezoelectric material, wherein each second layer includes electrodes, wherein the electrodes are configured to apply an electric field mainly in a plane parallel to the second layers, wherein a number of layers of one of the plurality of first layers and the plurality of second layers is at least two, and wherein a number of layers of the other one of the plurality of first layers and the plurality of second layers is at least three.