Pellicle and Pellicle Assembly

The invention relates to a pellicle assembly comprising a pellicle frame defining a surface onto which a pellicle is attached. The pellicle assembly comprises one or more three-dimensional expansion structures that allow the pellicle to expand under stress. The invention also relates to a pellicle a...

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Hauptverfasser: JOHAN HENDRIK KLOOTWIJK, PIETER-JAN VAN ZWOL, WILLEM JOAN VAN DER ZANDE, PETER SIMON ANTONIUS KNAPEN, DAVID FERDINAND VLES, CHAITANYA KRISHNA ANDE, ADRIANUS JOHANNES MARIA GIESBERS, HENDRIKUS JAN WONDERGEM, PAUL JANSSEN, HRISHIKESH PATEL, ARNOUD WILLEM NOTENBOOM, WILHELMUS THEODORUS ANTHONIUS JOHANNES VAN DEN EINDEN, WOUTER ROGIER MEIJERINK, JOHANNES PETRUS MARTINUS BERNARDUS VERMEULEN, MAXIM ALEKSANDROVICH NASALEVICH, JOHANNES JOSEPH JANSSEN, MÁRIA PÉTER, ALEXANDAR NIKOLOV ZDRAVKOV, MARCEL PETER MEIJER, WILLEM-PIETER VOORTHUIJZEN, RAYMOND OLSMAN, GERRIT VAN DEN BOSCH, ANTONIUS FRANCISCUS JOHANNES DE GROOT, EVGENIA KURGANOVA
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creator JOHAN HENDRIK KLOOTWIJK
PIETER-JAN VAN ZWOL
WILLEM JOAN VAN DER ZANDE
PETER SIMON ANTONIUS KNAPEN
DAVID FERDINAND VLES
CHAITANYA KRISHNA ANDE
ADRIANUS JOHANNES MARIA GIESBERS
HENDRIKUS JAN WONDERGEM
PAUL JANSSEN
HRISHIKESH PATEL
ARNOUD WILLEM NOTENBOOM
WILHELMUS THEODORUS ANTHONIUS JOHANNES VAN DEN EINDEN
WOUTER ROGIER MEIJERINK
JOHANNES PETRUS MARTINUS BERNARDUS VERMEULEN
MAXIM ALEKSANDROVICH NASALEVICH
JOHANNES JOSEPH JANSSEN
MÁRIA PÉTER
ALEXANDAR NIKOLOV ZDRAVKOV
MARCEL PETER MEIJER
WILLEM-PIETER VOORTHUIJZEN
RAYMOND OLSMAN
GERRIT VAN DEN BOSCH
ANTONIUS FRANCISCUS JOHANNES DE GROOT
EVGENIA KURGANOVA
description The invention relates to a pellicle assembly comprising a pellicle frame defining a surface onto which a pellicle is attached. The pellicle assembly comprises one or more three-dimensional expansion structures that allow the pellicle to expand under stress. The invention also relates to a pellicle assembly for a patterning device comprising one or more actuators for moving the pellicle assembly towards and way from the patterning device.
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The pellicle assembly comprises one or more three-dimensional expansion structures that allow the pellicle to expand under stress. The invention also relates to a pellicle assembly for a patterning device comprising one or more actuators for moving the pellicle assembly towards and way from the patterning device.</abstract><oa>free_for_read</oa></addata></record>
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language eng
recordid cdi_epo_espacenet_NL2024717A
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
title Pellicle and Pellicle Assembly
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