Gas Mixing For Fast Temperature Control On the Cooling Hood

The present invention relates to a system comprising a sub-system that is configured to change a thermal condition of a physical component from a set-point to a new set-point, wherein the sub-system comprises: a mixer operative to receive a first conditioning fluid having a first temperature and a se...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHRISTIAAN LOUIS VALENTIN, DRIES VAAST PAUL HEMSCHOOTE, ALAIN LOUIS CLAUDE LEROUX, ALEXANDER MARINUS ARNOLDUS HUIJBERTS, JOOST DE HOOGH, JOHANNES FRANCISCUS VAN SANTVOORT, ROBERT COENRAAD WIT, FRITS VAN DER MEULEN
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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