Gas Mixing For Fast Temperature Control On the Cooling Hood

Gas Mixing For Fast Temperature Control On the Cooling Hood

The present invention relates to a system comprising a sub-system that is configured to change a thermal condition of a physical component from a set-point to a new set-point, wherein the sub-system comprises: a mixer operative to receive a first conditioning fluid having a first temperature and a se...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHRISTIAAN LOUIS VALENTIN, DRIES VAAST PAUL HEMSCHOOTE, ALAIN LOUIS CLAUDE LEROUX, ALEXANDER MARINUS ARNOLDUS HUIJBERTS, JOOST DE HOOGH, JOHANNES FRANCISCUS VAN SANTVOORT, ROBERT COENRAAD WIT, FRITS VAN DER MEULEN
Format: Patent
Sprache:eng
Schlagworte:
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Beschreibung
Zusammenfassung:The present invention relates to a system comprising a sub-system that is configured to change a thermal condition of a physical component from a set-point to a new set-point, wherein the sub-system comprises: a mixer operative to receive a first conditioning fluid having a first temperature and a second 5 conditioning fluid having a second temperature different from the first temperature, and operative to supply to the physical component a mix of the first conditioning fluid and the second conditioning fluid; and a controller configured to control the mixer in dependence on the new set-point. Also described is a method of operating a lithographic apparatus as well as a device manufactured using the system described herein or according to the methods described herein. 10 Fig. 2