SYSTEM FOR TESTING A MIRROR SUCH AS A COLLECTOR MIRROR AND METHOD OF TESTING A MIRROR SUCH AS A COLLECTOR MIRROR

A system configured for testing a collector mirror having a first focus and a second focus is disclosed, the system comprises: a test radiation sub-system operative to project test radiation from the second focus onto the collector mirror; a sensor sub-system operative to receive test radiation refl...

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Bibliographische Detailangaben
1. Verfasser:	JOHANNES CHRISTIAAN LEONARDUS FRANKEN
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A system configured for testing a collector mirror having a first focus and a second focus is disclosed, the system comprises: a test radiation sub-system operative to project test radiation from the second focus onto the collector mirror; a sensor sub-system operative to receive test radiation reflected off the collector mirror towards the first focus; and a radiation limiter sub-system operative to limit the test radiation as received by the sensor to test radiation reflected off a limited portion of the collector mirror; a control sub-system operative to control a movement of the radiation limiter sub-system along a sequence of different positions, thereby limiting the test radiation as received by the sensor to test radiation reflected off a respective sequence of different limited portions of the collector mirror.