Monolithic semiconductor device for optical sensing
A monolithic semiconductor device (101) forms a Fabry-Perot sensor (503) when coupled to an optical fiber (501). The monolithic semiconductor device (101) comprises a cavity (108) that extends from a back side (105) to a front side (106) of the monolithic semiconductor device (101). The back side (1...
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| creator | NIEK RIJNVELD GRZEGORZ GRUCA |
| description | A monolithic semiconductor device (101) forms a Fabry-Perot sensor (503) when coupled to an optical fiber (501). The monolithic semiconductor device (101) comprises a cavity (108) that extends from a back side (105) to a front side (106) of the monolithic semiconductor device (101). The back side (105) of the monolithic semiconductor device (101) can be coupled to an end (504) of the optical fiber (501). The end (504) of the optical fiber (501) then seals off the cavity (108) in the monolithic semiconductor device (101) at the back side (105). The monolithic semiconductor device (101) comprises a light reflecting membrane (109) that seals off the cavity (108) in the monolithic semiconductor device (101) at the front side (106). The light reflecting membrane (109) is comprised of silicon nitride. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_NL2022390BB9</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>NL2022390BB9</sourcerecordid><originalsourceid>FETCH-epo_espacenet_NL2022390BB93</originalsourceid><addsrcrecordid>eNrjZDD2zc_Lz8ksychMVihOzc1Mzs9LKU0uyS9SSEkty0xOVUgDMvMLSjKTE3OACvKKM_PSeRhY0xJzilN5oTQ3g6Kba4izh25qQX58anFBYnJqXmpJvJ-PkYGRkbGlgZOTpTExagA-Yi0X</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Monolithic semiconductor device for optical sensing</title><source>esp@cenet</source><creator>NIEK RIJNVELD ; GRZEGORZ GRUCA</creator><creatorcontrib>NIEK RIJNVELD ; GRZEGORZ GRUCA</creatorcontrib><description>A monolithic semiconductor device (101) forms a Fabry-Perot sensor (503) when coupled to an optical fiber (501). The monolithic semiconductor device (101) comprises a cavity (108) that extends from a back side (105) to a front side (106) of the monolithic semiconductor device (101). The back side (105) of the monolithic semiconductor device (101) can be coupled to an end (504) of the optical fiber (501). The end (504) of the optical fiber (501) then seals off the cavity (108) in the monolithic semiconductor device (101) at the back side (105). The monolithic semiconductor device (101) comprises a light reflecting membrane (109) that seals off the cavity (108) in the monolithic semiconductor device (101) at the front side (106). The light reflecting membrane (109) is comprised of silicon nitride.</description><language>eng</language><subject>ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS ; MEASURING ; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE ; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE ; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PHYSICS ; TARIFF METERING APPARATUS ; TESTING</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201012&DB=EPODOC&CC=NL&NR=2022390B9$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201012&DB=EPODOC&CC=NL&NR=2022390B9$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>NIEK RIJNVELD</creatorcontrib><creatorcontrib>GRZEGORZ GRUCA</creatorcontrib><title>Monolithic semiconductor device for optical sensing</title><description>A monolithic semiconductor device (101) forms a Fabry-Perot sensor (503) when coupled to an optical fiber (501). The monolithic semiconductor device (101) comprises a cavity (108) that extends from a back side (105) to a front side (106) of the monolithic semiconductor device (101). The back side (105) of the monolithic semiconductor device (101) can be coupled to an end (504) of the optical fiber (501). The end (504) of the optical fiber (501) then seals off the cavity (108) in the monolithic semiconductor device (101) at the back side (105). The monolithic semiconductor device (101) comprises a light reflecting membrane (109) that seals off the cavity (108) in the monolithic semiconductor device (101) at the front side (106). The light reflecting membrane (109) is comprised of silicon nitride.</description><subject>ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS</subject><subject>MEASURING</subject><subject>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</subject><subject>MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE</subject><subject>MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>PHYSICS</subject><subject>TARIFF METERING APPARATUS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDD2zc_Lz8ksychMVihOzc1Mzs9LKU0uyS9SSEkty0xOVUgDMvMLSjKTE3OACvKKM_PSeRhY0xJzilN5oTQ3g6Kba4izh25qQX58anFBYnJqXmpJvJ-PkYGRkbGlgZOTpTExagA-Yi0X</recordid><startdate>20201012</startdate><enddate>20201012</enddate><creator>NIEK RIJNVELD</creator><creator>GRZEGORZ GRUCA</creator><scope>EVB</scope></search><sort><creationdate>20201012</creationdate><title>Monolithic semiconductor device for optical sensing</title><author>NIEK RIJNVELD ; GRZEGORZ GRUCA</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_NL2022390BB93</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2020</creationdate><topic>ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS</topic><topic>MEASURING</topic><topic>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</topic><topic>MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE</topic><topic>MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR</topic><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>PHYSICS</topic><topic>TARIFF METERING APPARATUS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>NIEK RIJNVELD</creatorcontrib><creatorcontrib>GRZEGORZ GRUCA</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>NIEK RIJNVELD</au><au>GRZEGORZ GRUCA</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Monolithic semiconductor device for optical sensing</title><date>2020-10-12</date><risdate>2020</risdate><abstract>A monolithic semiconductor device (101) forms a Fabry-Perot sensor (503) when coupled to an optical fiber (501). The monolithic semiconductor device (101) comprises a cavity (108) that extends from a back side (105) to a front side (106) of the monolithic semiconductor device (101). The back side (105) of the monolithic semiconductor device (101) can be coupled to an end (504) of the optical fiber (501). The end (504) of the optical fiber (501) then seals off the cavity (108) in the monolithic semiconductor device (101) at the back side (105). The monolithic semiconductor device (101) comprises a light reflecting membrane (109) that seals off the cavity (108) in the monolithic semiconductor device (101) at the front side (106). The light reflecting membrane (109) is comprised of silicon nitride.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TARIFF METERING APPARATUS TESTING |
| title | Monolithic semiconductor device for optical sensing |
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