Monolithic semiconductor device for optical sensing

A monolithic semiconductor device (101) forms a Fabry-Perot sensor (503) when coupled to an optical fiber (501). The monolithic semiconductor device (101) comprises a cavity (108) that extends from a back side (105) to a front side (106) of the monolithic semiconductor device (101). The back side (1...

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Bibliographische Detailangaben
Hauptverfasser:	NIEK RIJNVELD, GRZEGORZ GRUCA
Format:	Patent
Sprache:	eng
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TARIFF METERING APPARATUS TESTING
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Beschreibung
Zusammenfassung:	A monolithic semiconductor device (101) forms a Fabry-Perot sensor (503) when coupled to an optical fiber (501). The monolithic semiconductor device (101) comprises a cavity (108) that extends from a back side (105) to a front side (106) of the monolithic semiconductor device (101). The back side (105) of the monolithic semiconductor device (101) can be coupled to an end (504) of the optical fiber (501). The end (504) of the optical fiber (501) then seals off the cavity (108) in the monolithic semiconductor device (101) at the back side (105). The monolithic semiconductor device (101) comprises a light reflecting membrane (109) that seals off the cavity (108) in the monolithic semiconductor device (101) at the front side (106). The light reflecting membrane (109) is comprised of silicon nitride.