A Flow Restriction, a Flow Restriction Assembly, a Lithographic Apparatus, a Method for Manufacturing the Flow Restriction and a Method for Manufacturing the Flow Restriction Assembly

A Flow Restriction, a Flow Restriction Assembly, a Lithographic Apparatus, a Method for Manufacturing the Flow Restriction and a Method for Manufacturing the Flow Restriction Assembly

A flow restriction for use in a pipe so as to restrict the flow of a fluid. The flow restriction comprising a body extending along an axis and comprising: a centre portion having a constant cross section along the axis; an upstream portion connected to an upstream side of the centre portion along th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PHILIPPE JACQUELINE JOHANNES HUBERTUS ANTHONIUS HABETS, BAS BASTIAAN CORNELIS GIJSBERTUS VAN ELTEN, REMCO VAN DE MEERENDONK
Format: Patent
Sprache:eng
Schlagworte:
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Beschreibung
Zusammenfassung:A flow restriction for use in a pipe so as to restrict the flow of a fluid. The flow restriction comprising a body extending along an axis and comprising: a centre portion having a constant cross section along the axis; an upstream portion connected to an upstream side of the centre portion along the axis, wherein the cross-sectional area of the upstream portion monotonically increases in a downstream direction along the axis; and a downstream portion connected to a downstream side of the centre portion, wherein the cross-sectional area of the downstream portion monotonically decreases in the downstream direction. The flow restriction further comprises a plurality of centre portion projections for engaging the inner surface of a pipe, each of which projects from the surface of the centre portion in a direction perpendicular to the surface of the centre portion by a distance of less than 500 f.! m.