Radiation filter for a radiation sensor

A radiation filter for reducing transmission of an unwanted wavelength of radiation. The radiation filter comprises zirconium and SÍN3. The radiation filter may form part of a radiation sensor comprising a passivation layer arranged to receive radiation transmitted by the radiation filter, a photodi...

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Bibliographische Detailangaben
Hauptverfasser:	WOUTER JOEP ENGELEN, YASSIN CHOWDHURY, PIETER CRISTIAAN DE GROOT, VAHID MOHAMMADI, MARCEL JOHANNES PETRUS THEODORUS VAN DER HOORN
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A radiation filter for reducing transmission of an unwanted wavelength of radiation. The radiation filter comprises zirconium and SÍN3. The radiation filter may form part of a radiation sensor comprising a passivation layer arranged to receive radiation transmitted by the radiation filter, a photodiode arranged to receive radiation transmitted by the passivation layer, and circuit elements connected to the photodiode. The radiation sensor may perform optical measurements as part of an extreme ultraviolet lithographic apparatus or a lithographic tool.