APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A PELLICLE

An apparatus for determining a condition associated with a pellicle (19) for use in a lithographic apparatus (LA), the apparatus comprising a sensor (26, 32, 52, 60), wherein the sensor (26, 32, 52, 60) is configured to measure a property associated with the pellicle 19, the property being indicativ...

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Bibliographische Detailangaben
Hauptverfasser:	ANDREW JUDGE, DERK SERVATIUS GERTRUDA BROUNS, MARCUS ADRIANUS VAN DE KERKHOF, THEODORUS MARINUS MODDERMAN, JOSHUA ADAMS, RICHARD JACOBS, JOSEPH HARRY LYONS, AAGE BENDIKSEN, XUGANG XIONG, VEERA VENKATA NARASIMHA NARENDRA PHANI KOTTAPALLI, MANISH RANJAN
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	An apparatus for determining a condition associated with a pellicle (19) for use in a lithographic apparatus (LA), the apparatus comprising a sensor (26, 32, 52, 60), wherein the sensor (26, 32, 52, 60) is configured to measure a property associated with the pellicle 19, the property being indicative of the pellicle condition.