Local User Interface

A local user interface (14, 16) for a substrate processing apparatus (10, 12), the user interface comprising a display device (18) and a display controller (20) that determines contents to be displayed on the display device, characterized in that a proximity sensor (22) is provided for detecting whe...

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1. Verfasser: VINCENT BARTHELEMY
Format: Patent
Sprache:eng
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Zusammenfassung:A local user interface (14, 16) for a substrate processing apparatus (10, 12), the user interface comprising a display device (18) and a display controller (20) that determines contents to be displayed on the display device, characterized in that a proximity sensor (22) is provided for detecting whether or not an operator (24) is present within a given neighborhood (26) of the substrate processing apparatus (10, 12) and the display controller (20) is configured to change the contents to be displayed in accordance with a detection result of the proximity sensor (22).