A fuel collector and associated system

A radiation system comprising a fuel emitter configured to provide fuel to a plasma formation region, an excitation device arranged to provide an excitation beam at the plasma formation region to convert at least a part of the fuel into a radiation emitting plasma and a fuel collector configured to...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	JOHANNES CHRISTIAAN LEONARDUS FRANKEN
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS X-RAY TECHNIQUE
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Beschreibung
Zusammenfassung:	A radiation system comprising a fuel emitter configured to provide fuel to a plasma formation region, an excitation device arranged to provide an excitation beam at the plasma formation region to convert at least a part of the fuel into a radiation emitting plasma and a fuel collector configured to collect at least another part of the fuel, said at least other part of the fuel comprising fuel that passes through the plasma formation region without being converted to radiation emitting plasma, the fuel collector comprising a movable surface for receiving the fuel, the fuel collector being configured to move the surface at a velocity or speed that is selected in dependence on a velocity or speed of the fuel.