A PRESSURE CONTROL VALVE, A FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS

A PRESSURE CONTROL VALVE, A FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS

A pressure control valve comprises: a passageway having a portion defining an opening for the flow of fluid therethrough; an obstructing member displaceable relative to the opening for obstructing the opening hereby to regulate a volumetric flow rate of fluid through the opening; a piezo actuator; a...

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Hauptverfasser: KOEN CUYPERS, ROGIER HENDRIKUS MAGDALENA CORTIE, JEROEN GERARD GOSEN, SUDHIR SRIVASTAVA, STEF MARTEN JOHAN JANSSENS, HENDRIKUS JOHANNES SCHELLENS, ADRIANUS MARINUS WOUTER HEEREN, ERIK HENRICUS EGIDIUS CATHARINA EUMMELEN, THEODORUS JOHANNES ANTONIUS RENCKENS, BO LENSSEN
Format: Patent
Sprache:eng
Schlagworte:
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Beschreibung
Zusammenfassung:A pressure control valve comprises: a passageway having a portion defining an opening for the flow of fluid therethrough; an obstructing member displaceable relative to the opening for obstructing the opening hereby to regulate a volumetric flow rate of fluid through the opening; a piezo actuator; and a linkage mechanism adapted to amplify a magnitude of a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the obstructing member relative to the opening. The linkage mechanism comprises a frame attached to a wall and fixed at a first end in relation to the passageway, a movable portion of the frame moveable in a first direction whilst being substantially restrained in a second direction. The piezo actuator extends between the wall and the moveable portion such that an expansion of the piezo actuator results in larger movement of the moveable portion in the first direction.