Method and apparatus for exposing a sample

The invention relates to a method and an apparatus for exposing a sample. The apparatus comprises an exposing unit for exposing said sample to electromagnetic radiation or particles having energy, and a substrate holding device for holding said sample at least during said exposing. The exposing unit...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JERRY JOHANNES MARTINUS PEIJSTER, PAUL IJMERT SCHEFFERS
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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