Method of obtaining a graded PECVD layer and plasma source assembly

Plasma source assembly (1) within a plasma enhanced chemical vapor deposition (PECVD) device and method of providing a flow of particles to a substrate. A plasma treatment outlet forms a plasma process zone for depositing a layer on the surface (2) by relative movement of the surface (2) along the p...

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Hauptverfasser:	ARTHUR WOUTER WEEBER, MACHTELD WILLEMIJN PETRONEL ELISABETH LAMERS
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Plasma source assembly (1) within a plasma enhanced chemical vapor deposition (PECVD) device and method of providing a flow of particles to a substrate. A plasma treatment outlet forms a plasma process zone for depositing a layer on the surface (2) by relative movement of the surface (2) along the plasma treatment outlet. The plasma treatment outlet has an upstream elongated rim (6) and a downstream elongated rim (7). A plasma creation zone (3) is present, as well as one or more input ports (9-11) positioned in the plasma process zone for providing a process gas to the plasma creation zone (3). The plasma source assembly (1) is further arranged to provide a gradient in the concentration of particles in the flow as measured from the upstream elongated rim (6) to the downstream elongated rim (7).