Projection System

A projection system for a lithographic apparatus comprises: an optical path; a plurality of sensors; one or more actuators; and a controller. The optical path is operable to receive an input radiation beam and to project an output radiation beam onto a substrate to form an image. The optical path comprises: a plurality of optical elements, the plurality of optical 5 elements comprising: a first set of at least two optical elements and a second set of at least one optical element. Each sensor is associated with one of the plurality of optical elements and is operable to determine a position of that optical element. Each actuator is associated with one of the second set of optical elements and is operable to adjust that optical element. The controller is operable to use the one or more actuators to adjust the second set of 10 optical elements in dependence on the determined position of the first set of optical elements so as to at least partially compensate for optical aberrations and/or line-of-sight errors caused by the positions of the first set of optical elements.