Encoder, position measurement system and lithographic apparatus

Encoder, position measurement system and lithographic apparatus

An encoder comprises an optical component and an enclosing device having a first surface portion and a second surface portion. The first surface portion is arranged to receive from an ambient environment a first radiation beam. The second surface portion is arranged to receive from the ambient envir...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MR. JAN PETER BAARTMAN, WOUTER PRIL, BRYAN TONG-MINH, EELCO KOOIKER, SUZANNE COSIJNS
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:An encoder comprises an optical component and an enclosing device having a first surface portion and a second surface portion. The first surface portion is arranged to receive from an ambient environment a first radiation beam. The second surface portion is arranged to receive from the ambient environment a second radiation beam. The optical component is arranged to 5 combine the first radiation beam and the second radiation beam. The enclosing device is arranged to propagate the first radiation beam along a first path. The first path is between the first surface portion and the optical component. The enclosing device is arranged to propagate the second radiation beam along a second path. The second path is between the second surface portion and the optical component. The enclosing device is arranged to enclose a space, so as to 10 isolate the first path and the second path from the ambient environment.