Lithographic apparatus

A lithographic apparatus has a compartment which accommodates a movable object. Movements of the movable object cause acoustic disturbances in the compartment. An acoustic damper is arranged to damp the acoustic disturbances in the compartment and comprises a chamber (100) in communication with the...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	MARTINUS VAN DUIJNHOVEN, HENRIKUS HERMAN MARIE COX, NICOLAAS RUDOLF KEMPER, ROBERTUS MATHIJS GERARDUS RIJS, FRANK JOHANNES JACOBUS VAN BOXTEL, MARC WILHELMUS MARIA VAN DER WIJST, MARK CONSTANT JOHANNES BAGGEN, ERWIN ANTONIUS HENRICUS FRANCISCUS VAN DEN BOOGAERT, SANDER KERSSEMAKERS, GERARD JOHANNES BOOGAARD, GÜNES NAKIBOGLU, JESSICA HENRICA ANNA VERDONSCHOT
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A lithographic apparatus has a compartment which accommodates a movable object. Movements of the movable object cause acoustic disturbances in the compartment. An acoustic damper is arranged to damp the acoustic disturbances in the compartment and comprises a chamber (100) in communication with the compartment and a perforated plate (101), having a plurality of through-holes (102), between the chamber and the compartment.