AN OBJECT HOLDER, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD

An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is diff...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	JACOBS JOHANNES, STEFFENS KOEN, PIETERSE GERBEN, SIMONS WILHELMUS, LAFARRE RAYMOND, POLET THEODORUS, OVERKAMP JIM, VY VAN VUONG, HOUBEN MARTIJN, LEMPENS HAN, BLOKS RUUD, CORTIE ROGIER, TROMP SIEGFRIED, LAURENT THIBAULT
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is different to a second material defining the passageway.