Method and device for examining a surface of an object
The method involves arranging an object (4) in a sample chamber (3), and supplying the particle beam to a predetermined location on the surface of the object. A gas is supplied to the predetermined place where the gas has charge neutralization at the predetermined location on the surface of the obje...
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| Hauptverfasser: | , |
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| Format: | Patent |
| Sprache: | dut |
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| Zusammenfassung: | The method involves arranging an object (4) in a sample chamber (3), and supplying the particle beam to a predetermined location on the surface of the object. A gas is supplied to the predetermined place where the gas has charge neutralization at the predetermined location on the surface of the object. An independent claim is included for a particle beam device for the execution of a surface examining method. |
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